Facilty
Crean Room
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| Anodic bonding machine (Front) and XeF2 etching machine (back) | Exposing Machine (left) and Palyene deposition machine (right) |
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| Spray coater | Annealing machine |
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Crean Room
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| ICP RIE (Sumitomo Precision Products Co., LTD.) | Thermal oxidation furnace |
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| PE-CVD | Sputter |
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Robot
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| Robot |
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Kansai Unive. Faculty of Engineering Science Dep. of Mechanical Engineering Robot/Microsystem Laboratory All Rights Reserved.